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By Hugh O Pierson

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Additional info for Handbook of chemical vapor depostion [i.e. deposition] (CVD) : principles, technology, and applications

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The structure of a CVD material can be classified into three major types which are shown schematically in Fig. [23] In Zone (A), the structure consists of columnar grains which are capped by a domelike top. In Zone (B), the structure is also columnar but more faceted and angular. In Zone (C), it consists of fine accost grains. Examples of these structures are shown in Fig. 13. Schematic of structures obtained by CVD: (a) columnar grains with domed tops, (b) faceted columnar grains, (c) equiaxed fine grains.

0 THERMODYNAMICS OF CVD A CVD reaction is governed by thermodynamics, that is the driving force which indicates the direction the reaction is going to proceed (if at all), and by kinetics, which defines the transport process and determines the rate-control mechanism, in other words, how fast it is going. Chemical thermodynamics is concerned with the interrelation of various forms of energy and the transfer of energy from one chemical system to another in accordance with the first and second laws of thermodynamics.

Schematic of structures obtained by CVD: (a) columnar grains with domed tops, (b) faceted columnar grains, (c) equiaxed fine grains. 6 Note: Reported values of CTE’s often vary widely. The values listed here are an average from several sources. ExamplesofCVDstluctures: (a)columnargrainswithdomedtops, (b) faceted columnar grains, (c) equiaxed fine grains, (d) mixed structures. (Source. faceted columnar grains, (c) equiaxed fine grains, (d) mixed structures. (Source. Ultramet, Pacoima. ) Ultramet, Pacoima.

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