By Professor Dr. Andreas Hierlemann (auth.), Professor Dr. H. Baltes, Professor Dr. Hiroyuki Fujita, Professor Dr. Dorian Liepmann (eds.)
This ebook, "Integrated Chemical Microsensor structures in CMOS Technology", presents a entire therapy of the hugely interdisciplinary box of CMOS chemical microsensor structures. it truly is certain at scholars, scientists and engineers who're attracted to gaining an creation to the sector of chemical sensing due to the fact that all of the useful basic wisdom is incorporated. although, because it offers distinct info on all vital matters on the topic of the belief of chemical microsensors in CMOS expertise, it additionally addresses specialists good conversant in the sector.
After a quick advent, the basics of chemical sensing are awarded. Fabrication and processing steps which are known within the semiconductor are then special through a brief description of the microfabrication ideas, and of the CMOS substrate and fabrics. Thereafter, a accomplished assessment of semiconductor-based and CMOS-based transducer constructions for chemical sensors is given. CMOS-technology is then brought as platform know-how, which permits the combination of those microtransducers with the required riding and sign conditioning circuitry at the comparable chip. In a subsequent part, the advance of monolithic multisensor arrays and completely constructed microsystems with on-chip sensor keep an eye on and conventional interfaces is defined. a brief part on packaging indicates that thoughts from the semiconductor might be utilized to chemical microsensor packaging. The ebook concludes with a quick outlook on destiny advancements, similar to the belief of extra complicated built-in microsensor platforms and techniques to interface organic fabrics, comparable to cells, with CMOS microelectronics.
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Extra info for Integrated Chemical Microsensor Systems in CMOS Technology
Any species that can be immobilized on the sensor can, in principle, be sensed. 10), which is deﬁned by the Gibbs energy minimum 1 Large parts of the material of Chap. 4 were originally published in the book: MEMS: A Practical Guide to Design, Analysis, and Applications, edited by Jan Korvink and Oliver Paul, William Andrew Publishing, Norwich, NY, 2005. Reprinted here with permission. 30 4 Microfabricated Chemical Sensors of the system. In the simplest case such chemomechanical sensors are gravimetric sensors responding to the mass of species accumulated in a sensing layer [61–63].
11) in a medium of high refractivity depends on the dielectric characteristics of the surrounding medium. This eﬀect is mediated by the evanescent ﬁeld, which penetrates from the optically denser guiding medium a few hundred nanometers into the optically rarer environment [149, 157, 158] (more details in Sect. 1 on integrated optics, see also Fig. 12). If the environment absorbs, energy will be transferred from the evanescent wave to the environment and attenuation of the traveling wave will occur (attenuated total reﬂection, ATR) [147, 148].
The piezoelectric properties of GaAs and, hence, the device characteristics are similar to those of quartz except for the strong temperature dependence. An integrated GaAsSAW sensor is shown in Fig. 3 . It consists of a 470 MHz SAW device along with a multistage ampliﬁer (4 gain stages and impedance matching 4-gain-stage amplifier output stage 470 MHz delay line Fig. 3. Micrograph of a monolithically integrated GaAs surface-acoustic-wave device showing the delay line, the ampliﬁer and the output stage.